Global Patent Index - EP 3171992 A1

EP 3171992 A1 20170531 - METHOD AND STATION FOR TREATMENT OF A TRANSPORT CONTAINER MADE OF PLASTIC MATERIAL FOR THE ATMOSPHERIC STORAGE AND CONVEYANCE OF SUBSTRATES

Title (en)

METHOD AND STATION FOR TREATMENT OF A TRANSPORT CONTAINER MADE OF PLASTIC MATERIAL FOR THE ATMOSPHERIC STORAGE AND CONVEYANCE OF SUBSTRATES

Title (de)

VERFAHREN UND STATION ZUR BEHANDLUNG EINES AUS KUNSTSTOFFMATERIAL HERGESTELLTEN TRANSPORTBEHÄLTERS ZUR ATMOSPHÄRISCHEN LAGERUNG UND FÖRDERUNG VON SUBSTRATEN

Title (fr)

PROCEDE ET STATION DE TRAITEMENT D'UNE BOÎTE DE TRANSPORT EN MATÉRIAU PLASTIQUE POUR LE CONVOYAGE ET LE STOCKAGE ATMOSPHÉRIQUE DE SUBSTRATS

Publication

EP 3171992 A1 20170531 (FR)

Application

EP 15742191 A 20150703

Priority

  • FR 1457174 A 20140724
  • EP 2015065171 W 20150703

Abstract (en)

[origin: WO2016012216A1] The invention relates to a method for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates, having walls enclosing a volume intended for the storage of substrates, characterized in that it comprises at least one plasma treatment step (103; 105) during which at least one interior wall of said transport box (3) is subjected to a plasma of a treatment gas at a gas pressure of less than 10,000 Pascal. The invention also relates to a station for the treatment of transport containers for the atmospheric storage and conveyance of substrates.

IPC 8 full level

B08B 7/00 (2006.01); B08B 9/08 (2006.01); H01L 21/677 (2006.01)

CPC (source: CN EP KR US)

B08B 7/0035 (2013.01 - CN EP KR US); B08B 7/005 (2013.01 - EP); B08B 9/0861 (2013.01 - CN EP KR US); B08B 9/205 (2013.01 - US); B08B 9/40 (2013.01 - US); H01J 37/32752 (2013.01 - KR)

Citation (search report)

See references of WO 2016012216A1

Citation (examination)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

WO 2016012216 A1 20160128; CN 106573277 A 20170419; CN 106573277 B 20200821; EP 3171992 A1 20170531; FR 3024057 A1 20160129; FR 3024057 B1 20160826; JP 2017527108 A 20170914; JP 6605578 B2 20191113; KR 20170037616 A 20170404; TW 201622051 A 20160616; TW I669771 B 20190821; US 10478872 B2 20191119; US 2017182526 A1 20170629

DOCDB simple family (application)

EP 2015065171 W 20150703; CN 201580040238 A 20150703; EP 15742191 A 20150703; FR 1457174 A 20140724; JP 2017503855 A 20150703; KR 20177003628 A 20150703; TW 104122045 A 20150707; US 201515325337 A 20150703