EP 3210230 B1 20201230 - STURDY MICROELECTROMECHANICAL SWITCH
Title (en)
STURDY MICROELECTROMECHANICAL SWITCH
Title (de)
ROBUSTER MIKROELEKTROMECHANISCHER SCHALTER
Title (fr)
COMMUTATEUR MICROELECTROMECANIQUE ROBUSTE
Publication
Application
Priority
- FR 1460104 A 20141021
- FR 2015052802 W 20151019
Abstract (en)
[origin: WO2016062956A1] The present invention relates to a switch (1) of a microelectromechanical system, said switch including: - a signal input line (4); - a signal output line (5); - a conductive membrane (2) that is capable of changing shape when conductively linked with the line (5) and includes a contact pad (9) facing the line (4); and - an electrode (3) for activating the membrane (2). Said switch is characterized in that the membrane (2) has a planar, rounded shape with a radial opening (2a) in the direction of the signal input line (4) that tapers from the periphery to the center of the membrane (2). The contact pad (9) is formed in the central region of the membrane (2). The activation electrode (3) has the same shape as the membrane (2), and there is nothing but an air space between the membrane (2), facing the activation electrode (3), and the activation electrode (3).
IPC 8 full level
H01H 59/00 (2006.01)
CPC (source: CN EP IL US)
H01H 51/22 (2013.01 - IL); H01H 59/0009 (2013.01 - CN EP IL US); H01H 2059/0072 (2013.01 - CN EP IL US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
FR 3027448 A1 20160422; FR 3027448 B1 20161028; CN 107078000 A 20170818; CN 107078000 B 20190618; EP 3210230 A1 20170830; EP 3210230 B1 20201230; ES 2863098 T3 20211008; IL 251793 A0 20170629; IL 251793 B 20210228; US 10121623 B2 20181106; US 2017316907 A1 20171102; WO 2016062956 A1 20160428
DOCDB simple family (application)
FR 1460104 A 20141021; CN 201580057186 A 20151019; EP 15805568 A 20151019; ES 15805568 T 20151019; FR 2015052802 W 20151019; IL 25179317 A 20170419; US 201515520667 A 20151019