EP 3462036 B1 20240403 - TURBOMOLECULAR VACUUM PUMP
Title (en)
TURBOMOLECULAR VACUUM PUMP
Title (de)
TURBOMOLEKULARVAKUUMPUMPE
Title (fr)
POMPE À VIDE TURBOMOLÉCULAIRE
Publication
Application
Priority
EP 17194409 A 20171002
Abstract (en)
[origin: JP2019065857A] To further increase contribution, in particular, on vacuum performance of a rotor disc.SOLUTION: A turbomolecular pump has at least two rotor discs (400) arranged adjacently. The rotor discs each have a plurality of blades (402) dispersedly arranged in a peripheral direction. The blades extend radially outward from a blade base part (404). Here, in at least one blade base part (404) of each rotor disc (400), at least one tooth-like projection part (412) is provided.SELECTED DRAWING: Figure 1
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/32 (2006.01); F04D 29/38 (2006.01); F04D 29/66 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 29/321 (2013.01); F05D 2250/70 (2013.01)
Citation (examination)
- JP S6361799 A 19880317 - NIPPON SOKEN
- EP 3002459 A1 20160406 - PFEIFFER VACUUM GMBH [DE]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3462036 A1 20190403; EP 3462036 B1 20240403; JP 2019065857 A 20190425; JP 6716656 B2 20200701
DOCDB simple family (application)
EP 17194409 A 20171002; JP 2018183168 A 20180928