EP 3488030 B1 20201216 - METHOD FOR POLISHING CONDUCTIVE METAL SURFACES
Title (en)
METHOD FOR POLISHING CONDUCTIVE METAL SURFACES
Title (de)
VERFAHREN ZUM POLIEREN VON LEITFÄHIGEN METALLOBERFLÄCHEN
Title (fr)
PROCÉDÉ POUR POLIR DES SURFACES MÉTALLIQUES CONDUCTRICES
Publication
Application
Priority
- EP 16181110 A 20160725
- EP 2017066768 W 20170705
Abstract (en)
[origin: WO2018019532A1] A method for polishing a conductive metal surface is provided. The method comprises the steps of a) providing an electrolyte comprising ammonium nitrate and ammonium chloride, b) connecting a first electrode to the conductive metal surface and connecting a second electrode to the electrolyte, wherein said conductive metal surface is the anode. Then, a gas phase surrounding the conductive metal surface is generated. This step comprises in no particular order a first voltage step and an immersion step. The first voltage step comprises applying a first electrical voltage to the first and second electrode, wherein this first electrical voltage is suitable for generating the gas phase. The immersion step comprises contacting the conductive metal surface with the electrolyte. Then, a second electrical voltage is applied and maintained for a period of at least 1 second.
IPC 8 full level
C25F 3/16 (2006.01); C25F 5/00 (2006.01); C25F 7/00 (2006.01)
CPC (source: EP)
C25F 3/16 (2013.01); C25F 5/00 (2013.01); C25F 7/00 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2018019532 A1 20180201; EP 3488030 A1 20190529; EP 3488030 B1 20201216
DOCDB simple family (application)
EP 2017066768 W 20170705; EP 17734749 A 20170705