EP 3769093 A1 20210127 - METHOD FOR CONTINUOUSLY DETERMINING ALL OF THE COMPONENTS OF THE RESISTANCE TENSOR OF THIN FILMS
Title (en)
METHOD FOR CONTINUOUSLY DETERMINING ALL OF THE COMPONENTS OF THE RESISTANCE TENSOR OF THIN FILMS
Title (de)
VERFAHREN ZUR KONTINUIERLICHEN BESTIMMUNG SÄMTLICHER KOMPONENTEN EINES WIDERSTANDSTENSORS VON DÜNNSCHICHTEN
Title (fr)
PROCÉDÉ DE DÉTERMINATION EN CONTINU DE LA TOTALITÉ DES COMPOSANTS D'UN TENSEUR DE RÉSISTANCE DE COUCHES MINCES
Publication
Application
Priority
- DE 102018106466 A 20180320
- EP 2019056760 W 20190319
Abstract (en)
[origin: WO2019179972A1] The invention relates to a method for continuously determining all the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types. The invention is to provide a method for continuously determining all of the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types, wherein a continuous determination of all the components of the resistance tensor is facilitated without switching the contact points using a minimum number of contacts. This is achieved in that a homogeneous thin film part (T) of any shape is provided with at least three contact points (Ki to K3) arranged at distances from one another. An input voltage U i(t) is applied at each of the contact points (K1 to K3), the currents Ii(t) flowing through the contact points (K1 to K3) are detected, and the complete resistance tensor p of the thin film part (T) is determined from the voltage and current values.
IPC 8 full level
G01R 1/073 (2006.01); G01R 27/02 (2006.01)
CPC (source: EP US)
G01N 27/041 (2013.01 - US); G01R 1/073 (2013.01 - EP); G01R 27/08 (2013.01 - US); G01R 27/28 (2013.01 - US); G01R 1/073 (2013.01 - US); G01R 27/02 (2013.01 - EP)
Citation (search report)
See references of WO 2019179972A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018106466 B3 20190425; CN 111886506 A 20201103; EP 3769093 A1 20210127; US 11402345 B2 20220802; US 2021231595 A1 20210729; WO 2019179972 A1 20190926
DOCDB simple family (application)
DE 102018106466 A 20180320; CN 201980020739 A 20190319; EP 19712738 A 20190319; EP 2019056760 W 20190319; US 201916981735 A 20190319