EP 3811153 A1 20210428 - METHOD AND DEVICE FOR EXPOSING PIXELS
Title (en)
METHOD AND DEVICE FOR EXPOSING PIXELS
Title (de)
VERFAHREN UND VORRICHTUNG ZUR BELICHTUNG VON BILDPUNKTEN
Title (fr)
PROCÉDÉ ET DISPOSITIF D'EXPOSITION À LA LUMIÈRE DE POINTS D'IMAGE
Publication
Application
Priority
EP 2018066181 W 20180619
Abstract (en)
[origin: WO2019242840A1] The invention relates to a method for exposing pixels (1) of a photosensitive layer (19) made of a photosensitive material (18) on a substrate, by means of an optical system, having the following features: - the pixels (1) are continuously moved relative to the optical system, - multiple secondary beams (16) are individually controlled by means of the optical system to individually expose each pixel (1) by switching the secondary beams (16) into either an ON state or an OFF state, wherein a) secondary beams (16) in an ON state individually expose the pixel (1) associated with each secondary beam (16), and b) secondary beams (16) in an OFF state do not individually expose the pixel (1) associated with each secondary beam (16), - wherein in order to produce pixels (1) with grey tones n>1, individual exposures are made using different secondary beams (16) with individual doses D, the grey tone G of each pixel (1) being defined by the sum of the individual doses D. The present invention further relates to a corresponding device.
IPC 8 full level
G03F 7/20 (2006.01)
CPC (source: EP KR US)
G03F 7/2051 (2013.01 - US); G03F 7/70283 (2013.01 - US); G03F 7/70291 (2013.01 - US); G03F 7/70358 (2013.01 - EP KR US); G03F 7/704 (2013.01 - EP KR US); G03F 7/70466 (2013.01 - EP KR US); G03F 7/70558 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2019242840 A1 20191226; CN 112236721 A 20210115; EP 3811153 A1 20210428; JP 2021534440 A 20211209; JP 7309759 B2 20230718; KR 102604859 B1 20231121; KR 20210021966 A 20210302; SG 11201910818P A 20200130; TW 202014803 A 20200416; TW 202401173 A 20240101; US 11681228 B2 20230620; US 2021247697 A1 20210812
DOCDB simple family (application)
EP 2018066181 W 20180619; CN 201880094294 A 20180619; EP 18734150 A 20180619; JP 2020567555 A 20180619; KR 20207034873 A 20180619; SG 11201910818P A 20180619; TW 108120217 A 20190612; TW 112133036 A 20190612; US 201816973578 A 20180619