EP 3891774 A1 20211013 - METHOD AND ARRANGEMENT FOR DISTANCE CONTROL BETWEEN A SAMPLE AND AN APERTURE
Title (en)
METHOD AND ARRANGEMENT FOR DISTANCE CONTROL BETWEEN A SAMPLE AND AN APERTURE
Title (de)
VERFAHREN UND ANORDNUNG ZUR ABSTANDSKONTROLLE ZWISCHEN EINER PROBE UND EINER APERTUR
Title (fr)
PROCÉDÉ ET AGENCEMENT DE COMMANDE DE DISTANCE ENTRE UN ÉCHANTILLON ET UNE OUVERTURE
Publication
Application
Priority
- SE 1851528 A 20181207
- SE 2019051242 W 20191206
Abstract (en)
[origin: WO2020117124A1] A method is provided for controlling a distance (d) between an aperture (3), in a wall (6) separating a sample region (2) from a low-pressure chamber (4) which is vacuum pumped, and a sample surface (Ss), facing the aperture (3), of a sample (1) placed in the sample region (2) at the distance (d) from the aperture (3). The distance (d) between the sample surface (Ss) and the aperture (3) may be controlled with a positioning system (Ps). The method comprises the steps of providing at least one gas outlet (5) arranged to direct gas into a volume between the wall (6) and the sample surface (Ss), providing a sample pressure by supplying a constant flow of gas from said at least one gas outlet (5), measuring at predetermined time intervals the pressure inside the low-pressure chamber (4), and controlling in a closed loop the positioning system (Ps) to keep the pressure inside the low-pressure chamber (4) constant, thereby keeping the distance(d)between the aperture (3) and the sample surface (Ss) constant.
IPC 8 full level
H01J 37/285 (2006.01); G01N 23/227 (2018.01)
CPC (source: EP SE)
G01N 23/227 (2013.01 - SE); G01N 23/2273 (2013.01 - EP); H01J 37/05 (2013.01 - SE); H01J 37/285 (2013.01 - EP); H01J 49/00 (2013.01 - SE); G01N 2223/085 (2013.01 - EP); G01N 2223/34 (2013.01 - EP); H01J 2237/182 (2013.01 - EP); H01J 2237/188 (2013.01 - EP); H01J 2237/20235 (2013.01 - EP SE); H01J 2237/2605 (2013.01 - EP); H01J 2237/2855 (2013.01 - EP)
Citation (search report)
See references of WO 2020117124A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020117124 A1 20200611; EP 3891774 A1 20211013; JP 2022512113 A 20220202; JP 7280359 B2 20230523; SE 1851528 A1 20200608; SE 542904 C2 20200915
DOCDB simple family (application)
SE 2019051242 W 20191206; EP 19821307 A 20191206; JP 2021531777 A 20191206; SE 1851528 A 20181207