EP 4012139 A4 20220928 - CLEAN ROOM CAPABLE OF INHIBITING GASEOUS MOLECULAR POLLUTANT FROM DIFFUSING
Title (en)
CLEAN ROOM CAPABLE OF INHIBITING GASEOUS MOLECULAR POLLUTANT FROM DIFFUSING
Title (de)
REINRAUM MIT FÄHIGKEIT ZUR VERHINDERUNG VON GASFÖRMIGEN MOLEKULAREN VERUNREINIGUNGEN DURCH DIFFUSION
Title (fr)
SALLE PROPRE SUSCEPTIBLE D'EMPÊCHER LA DIFFUSION D'UN POLLUANT MOLÉCULAIRE GAZEUX
Publication
Application
Priority
- CN 201910736090 A 20190809
- CN 2020104616 W 20200724
Abstract (en)
[origin: EP4012139A1] The present application relates to the technical field of clean workshops. Disclosed is a clean room capable of inhibiting gaseous molecular pollutants from diffusing. The clean room comprises a pressure regulation device assembly for regulating the air pressure in an upper technical interlayer dual-wall lane, such that during normal production, the air pressure in the upper technical interlayer dual-wall lane is higher than the air pressure in an adjacent upper technical interlayer with a pollution source and the air pressure in an adjacent upper technical interlayer without the pollution source; and/or for regulating the air pressure in a lower technical interlayer dual-wall lane, such that during normal production, the air pressure in the lower technical interlayer dual-wall lane is higher than the air pressure in an adjacent lower technical interlayer with the pollution source and the air pressure in an adjacent lower technical interlayer without the pollution source, or during normal production, the air pressure in the lower technical interlayer dual-wall lane is lower than the air pressure in the adjacent lower technical interlayer with the pollution source and the air pressure in the lower technical interlayer without the pollution source. The clean room disclosed in the present application can reduce or avoid the situation where pollutants generated by a production area with a pollution source enter a production area without the pollution source, thereby improving the yield of products in the production area without the pollution source.
IPC 8 full level
E04H 5/02 (2006.01); F24F 3/16 (2021.01); F24F 7/10 (2006.01); F24F 11/89 (2018.01); F24F 13/00 (2006.01); F24F 13/02 (2006.01); F24F 11/00 (2018.01)
CPC (source: CN EP KR)
E04H 1/1277 (2013.01 - CN KR); E04H 5/02 (2013.01 - CN KR); F24F 3/167 (2021.01 - CN EP KR); F24F 7/08 (2013.01 - CN EP); F24F 11/89 (2018.01 - CN KR); F24F 13/0227 (2013.01 - CN EP KR); F24F 2011/0005 (2013.01 - EP); F24F 2110/40 (2018.01 - EP)
Citation (search report)
- [IA] GB 2321862 A 19980812 - FUJI ELECTRIC CO LTD [JP]
- [A] CN 105987433 A 20161005 - S Y TECH ENG & CONSTRUCTION CO LTD, et al
- [A] WO 0118323 A1 20010315 - SPEEDFAM IPEC CORP [US], et al
- [A] US 2014196419 A1 20140717 - YANG WEIBING [CN], et al
- [A] US 5922095 A 19990713 - HUSTVEDT DAVID C [US], et al
- [A] GB 2177501 A 19870121 - KAJIMA CORP
- See also references of WO 2021027528A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 4012139 A1 20220615; EP 4012139 A4 20220928; CN 110439332 A 20191112; CN 110439332 B 20240903; KR 20220035264 A 20220321; WO 2021027528 A1 20210218
DOCDB simple family (application)
EP 20851748 A 20200724; CN 201910736090 A 20190809; CN 2020104616 W 20200724; KR 20227007036 A 20200724