Global Patent Index - EP 4098602 A1

EP 4098602 A1 20221207 - PROCESSING SYSTEM

Title (en)

PROCESSING SYSTEM

Title (de)

VERARBEITUNGSSYSTEM

Title (fr)

SYSTÈME DE TRAITEMENT

Publication

EP 4098602 A1 20221207 (EN)

Application

EP 22156348 A 20220211

Priority

JP 2021091795 A 20210531

Abstract (en)

A prompt piping operation during assembling is enabled. The present invention relates to a processing device in which a cradle 7A configured to be transportable in a separate manner from a chamber CB is provided in a position adjacent to the chamber CB accommodating a processing device in an inner portion thereof, and discharging device (exhaust device 3) is provided on the cradle 7A. An exhaust duct 14 includes a chamber-side duct 14a fixed to a unit base 4 provided in an upper portion of the chamber CB and provided in a state in which one end is communicatively connected to the inner portion of the chamber CB and the other end is oriented toward the cradle 7A, and a cradle-side duct 14b fixed to the cradle 7A and provided in a state in which one end is connected to the exhaust device 3 via a manifold 13 and the other end is oriented toward the chamber. It is configured such that, at the time of assembly in a processing plant, the other end of the chamber-side duct 14a and the other end of the cradle-side duct 14b are communicatively connected.

IPC 8 full level

B67C 7/00 (2006.01)

CPC (source: EP)

B67C 3/22 (2013.01); B67C 7/0073 (2013.01); B67C 2003/228 (2013.01)

Citation (applicant)

JP 2015157651 A 20150903 - DAINIPPON PRINTING CO LTD

Citation (search report)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

Designated validation state (EPC)

KH MA MD TN

DOCDB simple family (publication)

EP 4098602 A1 20221207; JP 2022184128 A 20221213

DOCDB simple family (application)

EP 22156348 A 20220211; JP 2021091795 A 20210531