EP 4162521 A1 20230412 - INSTALLATION AND METHOD FOR DISTRIBUTING A GAS MIXTURE
Title (en)
INSTALLATION AND METHOD FOR DISTRIBUTING A GAS MIXTURE
Title (de)
ANLAGE UND VERFAHREN ZUR VERTEILUNG EINES GASGEMISCHES
Title (fr)
INSTALLATION ET PROCÉDÉ DE DISTRIBUTION D'UN MÉLANGE DE GAZ
Publication
Application
Priority
- FR 2005922 A 20200605
- EP 2021064478 W 20210531
Abstract (en)
[origin: WO2021245000A1] Disclosed ins an installation for distributing a gas mixture comprising a source of a first gas (1), a source of a second gas (2), a mixing device (3) fluidically connected to the first gas source (1) and to the second gas source (2), the mixing device (3) being configured to produce at one outlet (33) a gas mixture comprising the first gas and the second gas, a first flow rate regulator member (41) and a second flow rate regulator member (42) configured to regulate respectively the flow rate of the first gas and the flow rate of the second gas flowing toward the mixing device (3) at a first flow rate setpoint (D1) and a second flow rate setpoint (D2) defining, while in operation, a production flow rate (DP) of the gas mixture at the outlet (33) of the mixing device (3), a control unit (5) configured to control the first and second flow rate regulator members (41, 42) so as to adjust the first flow rate setpoint (D1) and the second flow rate setpoint (D2) according to respective proportions relative to the production flow rate (DP), the respective proportions being determined according to at least one target content (C1, C2) in the gas mixture of the first gas and/or the second gas, a buffer tank (7) fluidically connected to the outlet (33) of the mixing device (3) on one hand, and to a distribution line (6) on the other hand, the distribution line (6) being configured to distribute the gas mixture to a consuming unit (10) with a consumption rate (DC) that is representative of a variable consumption of the gas mixture, at least one measurement sensor (8) configured to measure a physical quantity, the variation of which is representative of a variation of the consumption flow rate (DC) distributed by the distribution line (6) and to provide a first measurement signal of the physical quantity, the control unit (5) being connected to the measurement sensor (8) and configured to produce a first control signal using the first measurement signal, the flow rate regulator members (41, 42) being configured to adjust the first flow rate setpoint (D1) and the second flow rate setpoint (D2) in response to the first control signal.
IPC 8 full level
H01L 21/67 (2006.01)
CPC (source: EP KR US)
B01F 23/19 (2022.01 - US); B01F 25/40 (2022.01 - US); B01F 35/21112 (2022.01 - US); B01F 35/2113 (2022.01 - US); B01F 35/2202 (2022.01 - US); B01F 35/2211 (2022.01 - US); G05B 11/42 (2013.01 - KR); G05D 7/0623 (2013.01 - KR); G05D 11/13 (2013.01 - KR); G05D 11/132 (2013.01 - US); G05D 11/138 (2013.01 - US); H01L 21/67017 (2013.01 - EP KR)
Citation (search report)
See references of WO 2021245000A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3111085 A1 20211210; FR 3111085 B1 20230512; CN 115917721 A 20230404; EP 4162521 A1 20230412; JP 2023528067 A 20230703; KR 20230021674 A 20230214; TW 202206740 A 20220216; US 2023277993 A1 20230907; WO 2021245000 A1 20211209
DOCDB simple family (application)
FR 2005922 A 20200605; CN 202180039659 A 20210531; EP 2021064478 W 20210531; EP 21729523 A 20210531; JP 2022574653 A 20210531; KR 20227045309 A 20210531; TW 110120009 A 20210602; US 202118008365 A 20210531