EP 4176314 A1 20230510 - EUV COLLECTOR
Title (en)
EUV COLLECTOR
Title (de)
EUV-KOLLEKTOR
Title (fr)
COLLECTEUR EUV
Publication
Application
Priority
- DE 102020208298 A 20200702
- EP 2021065907 W 20210614
Abstract (en)
[origin: WO2022002566A1] An EUV collector (11) has a reflection surface (20) having a basic mirror shape of a sector of a sphere. A diffraction grating (22) for EUV used light (10) is applied to the reflection surface (20). The diffraction grating (22) is embodied in such a way that the EUV used light (10) emanating from a sphere center (21) of the sector of the sphere is diffracted toward a collecting region (23) by the diffraction grating (22). The collecting region (23) is at a distance spatially from the sphere center (21). This results in an EUV collector which makes possible an effective separation between EUV used light that is intended to be collected with the aid of the collector and extraneous light having a wavelength that differs from a used light wavelength.
IPC 8 full level
CPC (source: EP KR US)
G02B 5/09 (2013.01 - US); G02B 5/1838 (2013.01 - US); G02B 19/0019 (2013.01 - US); G02B 19/0095 (2013.01 - US); G03F 7/70033 (2013.01 - EP KR US); G03F 7/70158 (2013.01 - EP KR); G03F 7/70166 (2013.01 - US); G03F 7/70175 (2013.01 - EP KR US); G03F 7/702 (2013.01 - US); G03F 7/70575 (2013.01 - EP KR); G21K 1/062 (2013.01 - EP KR); G21K 1/067 (2013.01 - EP KR); G21K 2201/064 (2013.01 - EP KR)
Citation (search report)
See references of WO 2022002566A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022002566 A1 20220106; DE 102020208298 A1 20220105; EP 4176314 A1 20230510; JP 2023532957 A 20230801; KR 20230034325 A 20230309; US 2023146235 A1 20230511
DOCDB simple family (application)
EP 2021065907 W 20210614; DE 102020208298 A 20200702; EP 21733930 A 20210614; JP 2023500050 A 20210614; KR 20237003205 A 20210614; US 202218147976 A 20221229