EP 4271973 A1 20231108 - METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING AN ENCAPSULATING STRUCTURE COMPRISING AN OPAQUE THIN LAYER RESTING ON A PERIPHERAL MINERAL WALL
Title (en)
METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING AN ENCAPSULATING STRUCTURE COMPRISING AN OPAQUE THIN LAYER RESTING ON A PERIPHERAL MINERAL WALL
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER DETEKTIONSVORRICHTUNG MIT EINER EINKAPSELUNGSSTRUKTUR MIT EINER OPAKEN DÜNNSCHICHT AUF EINER PERIPHEREN MINERALISCHEN WAND
Title (fr)
PROCEDE DE FABRICATION D'UN DISPOSITIF DE DETECTION COMPORTANT UNE STRUCTURE D'ENCAPSULATION COMPORTANT UNE COUCHE MINCE OPAQUE REPOSANT SUR UNE PAROI PERIPHERIQUE MINERALE
Publication
Application
Priority
- FR 2100043 A 20210104
- EP 2021087868 W 20211230
Abstract (en)
[origin: WO2022144427A1] The invention relates to a method for manufacturing a detection device (1), comprising the steps of: o producing thermal detectors distributed in a detection array (2p) and a compensation array (2s) by means of sacrificial mineral layers (41, 42); o producing an encapsulating structure (30s) comprising an opaque thin layer (33) extending above the compensation array (2s); o partially removing the sacrificial mineral layers (41, 42) by chemical etching, so as to release the detection array (2p) and the compensation array (2s), and to obtain a peripheral wall (31s) then formed of a non-etched portion of the sacrificial mineral layers (41, 42) and surrounding the compensation array (2s), the opaque thin layer (33) then being suspended above the compensation array (2s) and resting on the peripheral wall.
IPC 8 full level
G01J 5/02 (2022.01); G01J 5/04 (2006.01); G01J 5/06 (2022.01)
CPC (source: EP IL KR)
G01J 5/0225 (2013.01 - EP IL KR); G01J 5/024 (2013.01 - EP IL KR); G01J 5/045 (2013.01 - EP IL KR); G01J 5/06 (2013.01 - EP IL); G01J 5/064 (2022.01 - EP IL KR); G01J 5/70 (2022.01 - EP IL KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022144427 A1 20220707; CA 3203028 A1 20220707; CN 116829914 A 20230929; EP 4271973 A1 20231108; FR 3118663 A1 20220708; FR 3118663 B1 20240712; IL 303960 A 20230801; KR 20230128301 A 20230904
DOCDB simple family (application)
EP 2021087868 W 20211230; CA 3203028 A 20211230; CN 202180092419 A 20211230; EP 21844791 A 20211230; FR 2100043 A 20210104; IL 30396023 A 20230621; KR 20237024248 A 20211230