EP 4388293 A1 20240626 - LEAK DETECTION OF VACUUM SYSTEMS
Title (en)
LEAK DETECTION OF VACUUM SYSTEMS
Title (de)
LECKDETEKTION VON VAKUUMSYSTEMEN
Title (fr)
DÉTECTION DE FUITE DE SYSTÈMES DE VIDE
Publication
Application
Priority
- GB 202111884 A 20210819
- EP 2022072960 W 20220817
Abstract (en)
[origin: GB2609962A] A vacuum system having a leak detection state, the vacuum system comprising: a process chamber having a fluid volume to be evacuated; a vacuum pump configured to evacuate the process chamber; at least one pressure sensor configured to measure the pressure within the process chamber; and a recorder programmed to record the pressure measured within the process chamber; wherein, in a leak detection state, the evacuated process chamber is isolated and the recorder is programmed to record data corresponding to the pressure measured within the evacuated process chamber over time; and wherein the vacuum pump is configured to evacuate the process chamber prior to the leak detection state and during normal use of the vacuum system.
IPC 8 full level
G01M 3/26 (2006.01)
CPC (source: EP GB)
F04B 37/14 (2013.01 - EP); F04B 49/06 (2013.01 - EP); F04B 49/065 (2013.01 - EP); G01M 3/26 (2013.01 - GB); G01M 3/34 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
GB 202111884 D0 20211006; GB 2609962 A 20230222; BE 1029702 A1 20230314; BE 1029702 B1 20230320; EP 4388293 A1 20240626; TW 202319850 A 20230516; WO 2023021090 A1 20230223
DOCDB simple family (application)
GB 202111884 A 20210819; BE 202105857 A 20211103; EP 2022072960 W 20220817; EP 22765545 A 20220817; TW 111131297 A 20220819